





|
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MPS-C-200
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MPS-C-300
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MPS-C-350
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Wafer
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尺寸
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100mm
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100mm
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100mm
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定位分辨率
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2.5 μm
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2.5 μm
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2.5 μm
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磁场
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磁场定向
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Arbitrary 3D 2.5
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Arbitrary 3D 2.5
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Arbitrary 3D 2.5
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最大值
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3KOe(0.3T)
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6KOe(0.6T)
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定向精度
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+/- 0.1º
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+/- 0.1º
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+/- 0.1º
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10mm直径范围内的均匀性
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+/- 2%
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+/- 2%
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+/- 2%
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稳定性
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Better than 0.1%
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Better than 0.1%
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Better than 0.1%
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集成霍尔传感器的反馈回路
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NO
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YES
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YES
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显微镜
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放大率从3.5X到180X的工业级数码变焦显微镜
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系统
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终端
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BNC, Triax, or Banana plug
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重量
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100kg to 120kg depending on options selected
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